BUSINESS
Smart Factory

Smart Factory

SMART FACTORY

Semiconductor logistics equipment inspection equipment

We have developed OHT (Overhead Hoist Transport) inspection equipment, a key logistics
transport equipment in the semiconductor manufacturing process and have installed it in large
quantities in domestic semiconductor lines and are actively expanding its deployment
to overseas semiconductor manufacturing lines in the United States and China.

Overhead Hoist Transport Wheel Measurement System

OHT-WMS

Responsible for stable operation and maintenance of OHT wheels by measuring the wear and tear of OHT driving wheels, which are core logistics transport equipment within the semiconductor FAB, in real time and transmitting the data to the FAB system.

Measurement of wheel displacement using a laser displacement sensor
Automatically measures the location where the laser displacement sensor is installed when the OHT passes through
Includes issue detection functions such as camera-based OHT ID recognition function and photo sensor-based OHT stop
Raw data storage and wheel status data for each OHT ID transmitted to the server
Rail deflection and abnormal vibration detection functions can be expanded by mounting on rails.
Acquired CE, UL, ISO 9001, 14001, 45001
Owns unique technology patents
Semiconductor line standardization and exclusive supply

Reference

More than 40 domestic semiconductor lines are in progress, with additional semiconductor lines in the U.S. and China being installed.
Applicable to semiconductors, displays, secondary batteries, automobile OHT logistics transport equipment