BUSINESS
Smart Factory

Smart Factory

SMART FACTORY

Semiconductor automation equipment

We are also actively commercializing a clean logistics system by developing
cleaning automation equipment for quality control of OHT, a key logistics
transfer equipment in the semiconductor manufacturing process.

Overhead Hoist Transport Cleaning System

OHT-OCS

It is an automatic cleaning equipment for the external particle (wheel dust, dust) fixture of OHT, a core logistics transfer equipment within the semiconductor FAB, and is responsible for the clean logistics system function through OHT quality control.

Application of proprietary pneumatic (Blowing & Suction) technology
Automatically measures the location where the laser displacement sensor is installed when the OHT passes through
There are few restrictions on installation space, installation on existing lines, and design tailored to customer needs are possible.
CE, UL certified
Technology patent

Reference

Domestic semiconductor line construction in progress
Applicable to OHT logistics transport equipment in semiconductor, display, secondary battery, and automobile fields